Title :
Magnetron Method Of Etching Patterns Forming On The Crystals For Acousto-Optic And Acoustoelectronic Devices
Author :
Nefedov, V.G. ; Melnikov, V.A.
Author_Institution :
St. Petersburg State Academy of Aerospace Instrumentation
Keywords :
Cathodes; Cooling; Crystals; Electrons; Etching; Lithium niobate; Manufacturing; Piezoelectric transducers; Plasma applications; Silicon;
Conference_Titel :
Surface Waves in Solid and Layered Structures, 1994, and National Conference on Acoustoelectronics. 1994 International Symposium on. Program and Abstracts
Conference_Location :
Moscow, Russia
DOI :
10.1109/ISSWAS.1994.662527
