DocumentCode
3429484
Title
Magnetron Method Of Etching Patterns Forming On The Crystals For Acousto-Optic And Acoustoelectronic Devices
Author
Nefedov, V.G. ; Melnikov, V.A.
Author_Institution
St. Petersburg State Academy of Aerospace Instrumentation
fYear
1994
fDate
17-23 May 1994
Keywords
Cathodes; Cooling; Crystals; Electrons; Etching; Lithium niobate; Manufacturing; Piezoelectric transducers; Plasma applications; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Surface Waves in Solid and Layered Structures, 1994, and National Conference on Acoustoelectronics. 1994 International Symposium on. Program and Abstracts
Conference_Location
Moscow, Russia
Type
conf
DOI
10.1109/ISSWAS.1994.662527
Filename
662527
Link To Document