Double PWM method for high voltage discharge energy control [wire bonding]

Author

Chiba, Takamasa ; Yamashita, Tsutomu ; Chubachi, Noriyoshi

Author_Institution

Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan

fYear

1995

fDate

4-6 Dec 1995

Firstpage

296

Lastpage

299

Abstract

High voltage discharge technology is important in the process of semiconductor manufacture, especially in the electric torch wire bonding system. For the wire bonding technology, a precise diameter of balls is required to form on the end of Au wire by a high voltage discharge arc. This paper describes a double PWM method developed to control the high voltage discharge energy in connection with the diameter of the balls to be formed

Keywords

PWM power convertors; high-voltage engineering; integrated circuit manufacture; lead bonding; power control; pulse generators; pulse transformers; spark machining; voltage control; Au; Au wire; arc noise rejection; double PWM method; electric torch wire bonding system; high voltage discharge arc; high voltage discharge energy control; optical fiber links; precise ball diameter; semiconductor manufacture; switching conversion step up method; Bonding; Current control; Fault location; Pulse amplifiers; Pulse circuits; Pulse generation; Pulse width modulation; Space vector pulse width modulation; Voltage control; Wire;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronic Manufacturing Technology Symposium, 1995, Proceedings of 1995 Japan International, 18th IEEE/CPMT International

Conference_Location

Omiya

Print_ISBN

0-7803-3622-4

Type

conf

DOI

10.1109/IEMT.1995.541048

Filename

541048