Title :
Revolution measurement of Novellus performance and capacity
Author :
Chang, Yu Cheng ; Huang, Guey Bao ; Lee, Po Y. ; Liao, Miao Cheng
Author_Institution :
Taiwan Semicond. Manuf. Co. Ltd., Hsin-Chu, Taiwan
Abstract :
Based on TOC (theory of constraint) concepts, this paper establishes a throughput forecast model to quickly get throughput by recipe parameter settings and find out the bottleneck in machine to raise the machine performance and capacity.
Keywords :
constraint theory; machinery; production control; technological forecasting; Novellus performance; forecast model; machine performance; recipe parameter settings; revolution measurement; theory of constraints; throughput forecast model; Availability; Costs; Manufacturing industries; Predictive models; Production facilities; Pulp manufacturing; Semiconductor device manufacture; Stability; Statistical analysis; Throughput;
Conference_Titel :
Semiconductor Manufacturing Technology Workshop, 2002
Print_ISBN :
0-7803-7604-8
DOI :
10.1109/SMTW.2002.1197371
