DocumentCode :
3431539
Title :
Prioritized automatic material handling services in 300 mm foundry manufacturing
Author :
Wang, Chia-Nan ; Liao, Da-Yin
Author_Institution :
Nat. Chiao Tung Univ., Hsinchu, Taiwan
fYear :
2002
fDate :
10-11 Dec. 2002
Firstpage :
109
Lastpage :
114
Abstract :
This paper presents a heuristic approach for differentiating material handling services in a highly automated environment of 300 mm foundry manufacturing. A preemptive dispatching policy, Highest Priority Job (HPJ) first, is proposed to expedite the movement of high priority products while keeping acceptable the incurred delays on regular ones. Simulation experiments based on realistic data from a local 300 mm foundry fab are conducted. Numerical results demonstrate that the proposed policy is excellent in reducing the transport delays of high priority products to some extremes. Features of HPJ are also discussed.
Keywords :
digital simulation; dispatching; hoists; integrated circuit manufacture; materials handling; wafer bonding; 300 mm; foundry manufacturing; highest priority job; overhead hoist transport; preemptive dispatching policy; prioritized automatic material handling service; semiconductor wafer manufacturing; transport delay; wafer fabrication; Delay; Foundries; Inspection; Manuals; Manufacturing automation; Manufacturing processes; Materials handling; Production; Semiconductor device manufacture; Semiconductor materials;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Manufacturing Technology Workshop, 2002
Print_ISBN :
0-7803-7604-8
Type :
conf
DOI :
10.1109/SMTW.2002.1197385
Filename :
1197385
Link To Document :
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