Response time measurement of electrostatic S-shaped film actuator related to environmental gas pressure conditions

Author

Shikida, Mitsuhiro ; Sato, Kazuo ; Takeshita, Kengo ; Suzuki, Seiko

Author_Institution

Dept. of Micro Syst. Eng., Nagoya Univ., Japan

fYear

1996

fDate

11-15 Feb 1996

Firstpage

210

Lastpage

215

Abstract

We have experimentally measured the response time of an electrostatic S-shaped film actuator relative to environmental gas pressure and applied voltage as an aid to the designing of gas valve systems. This actuator has an S-shaped film element whose S-shape propagates in the lateral direction. We experimentally measured the propagation speed of the S-bend continuously from start to stop by detecting the capacitance change between the film and one of the actuator electrode plates. It reached 7 m/s when the pressure was 1 Pa and the applied voltage was 120 V. The response times of the actuator, in which the film travels 5 mm laterally and 2 mm vertically, are 7.7 ms at atmospheric pressure and 2.2 ms at a low pressure of 100 Pa

Keywords

electrostatic devices; flow control; microactuators; valves; 10 mPa to 0.1 MPa; 120 V; 2.2 to 7.7 ms; 7 m/s; S-bend; acceleration time; atmospheric pressure; capacitance change; electrostatic S-shaped film actuator; environmental gas pressure conditions; gas valve systems; low pressure conditions; propagation speed; rarefied gas control; response time; terminal velocity; Capacitance measurement; Delay; Electrodes; Electrostatic actuators; Electrostatic measurements; Pressure measurement; Time measurement; Valves; Velocity measurement; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1996, MEMS '96, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE, The Ninth Annual International Workshop on

Conference_Location

San Diego, CA

Print_ISBN

0-7803-2985-6

Type

conf

DOI

10.1109/MEMSYS.1996.493982

Filename

493982