Development and characterization of micro-mechanical gratings for optical modulation

Author

Sene, Darren E. ; Grantham, Jeffrey W. ; Bright, Victor M. ; Comtois, John H.

Author_Institution

Air Force Inst. of Technol., Wright-Patterson AFB, OH, USA

fYear

1996

fDate

11-15 Feb 1996

Firstpage

222

Lastpage

227

Abstract

Two types of micro-electro-mechanical gratings have been designed for use as optical modulators. The gratings have been fabricated and experimentally characterized, yielding excellent results. Micro-electro-mechanical gratings are possible candidates for applications such as intra-cavity switches for Q-switched lasers, or intensity modulating switches for free-space optical interconnects. Compared to commercially available acousto-optic modulators, micro-electro-mechanical gratings are smaller, weigh less, and can be manufactured in large quantities for a fraction of the cost

Keywords

acousto-optical modulation; diffraction gratings; electro-optical modulation; electro-optical switches; electrostatic devices; microactuators; optical fabrication; Q-switched lasers; diffraction grating design; electrostatic actuation; free-space optical interconnects; intensity modulating switches; intra-cavity switches; micro-electro-mechanical gratings; optical modulation; thermal actuation; Actuators; Diffraction gratings; Electrodes; Electrons; Electrostatics; Optical design; Optical diffraction; Optical interconnections; Optical modulation; Optical switches;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1996, MEMS '96, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE, The Ninth Annual International Workshop on

Conference_Location

San Diego, CA

Print_ISBN

0-7803-2985-6

Type

conf

DOI

10.1109/MEMSYS.1996.493984

Filename

493984