(Nd,Tb)-Fe-B thin film magnets prepared by magnetron sputtering

Author

Araki, T. ; Okabe, M.

Author_Institution

Adv. Technol. R&D Center, Mitsubishi Electr. Corp., Japan

fYear

1996

fDate

11-15 Feb 1996

Firstpage

244

Lastpage

249

Abstract

Thin film magnets are important materials for magnetic rotors used in micro-electromagnetic devices. We examined the magnetic properties of (Nd,Tb)-Fe-B thin film magnets prepared by magnetron sputtering on the composition and conditions of deposition. We obtained perpendicular magnetization (Nd_0.94Tb_0.06)₁₃Fe₇₃B₁₄ film with a thickness of 10 μm and maximum energy produce of 190 kJ/m³. We also developed a magnetic rotor with a cylindrical thin film magnet for a micromotor having radial gap. This rotor was formed by depositing the 10 μm-thick perpendicular magnetization film on the side wall of a 340 μm-diameter shaft. It was suggested that this rotor had radial magnetization

Keywords

boron alloys; iron alloys; magnetic thin film devices; magnetisation; micromotors; neodymium alloys; permanent magnet motors; permanent magnets; rotors; sputtered coatings; terbium alloys; thin film devices; (Nd,Tb)-Fe-B thin film magnets; (Nd_0.94Tb_0.06)₁₃Fe₇₃B ₁₄; (Nd_0.94Tb_0.06)₁₃Fe₇₃B ₁₄ film; (NdTb)-Fe-B; 10 mum; 340 mum; composition; cylindrical thin film magnet; magnetic rotor; magnetic rotors; magnetron sputtering; micro-electromagnetic devices; perpendicular magnetization; radial magnetization; thin film magnets; Iron; Magnetic devices; Magnetic films; Magnetic materials; Magnetic properties; Magnetization; Magnets; Neodymium; Sputtering; Thin film devices;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1996, MEMS '96, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE, The Ninth Annual International Workshop on

Conference_Location

San Diego, CA

Print_ISBN

0-7803-2985-6

Type

conf

DOI

10.1109/MEMSYS.1996.493988

Filename

493988