DocumentCode :
3436525
Title :
Coil winding process for radial gap type electromagnetic devices with cylindrical stator
Author :
Ota, Hitoshi ; Araki, Takeshi ; Narumiya, Hiromu ; Oda, Takuji ; Kobayashi, Minoru
Author_Institution :
Adv. Technol. R&D Center, Mitsubishi Electr. Corp., Hyogo, Japan
fYear :
1996
fDate :
11-15 Feb 1996
Firstpage :
325
Lastpage :
330
Abstract :
This paper presents a fabrication process for forming a cylindrical stator incorporating micro-coils. Micro-coils are formed on a silicon substrate using the semiconductor processing technique. The substrate is then covered with a die having the shape of the stator teeth to fill the coils with a magnetic material by electroplating. After electroplating, the die and unwanted part of the core are eliminated. The substrate is also removed by etching it on the reverse side to obtain a sheet in which coils and teeth have been formed. After a sacrifice layer is formed on the surface of a separately fabricated 2-pole magnetized permanent magnet rotor, the sheet is wound utilizing magnetic force. This is inserted into a die and the gaps are filled with a magnetic material to form a core back to complete the cylindrical stator. Using this process, a prototype of an integrated stator and rotor were fabricated in an integrated manner. They were fixed to a housing and the sacrifice layer was eliminated to complete the generator. The voltage induced by generator rotation was measured
Keywords :
coils; electromagnetic devices; electroplating; elemental semiconductors; etching; micromachining; micromotors; semiconductor technology; silicon; stators; 2-pole magnetized permanent magnet rotor; Si; Si substrate; coil winding process; cylindrical stator; die; electroplating; etching; fabrication; generator rotation; magnetic material; microcoils; radial gap type electromagnetic devices; sacrifice layer; semiconductor processing; stator teeth; Coils; Electromagnetic devices; Fabrication; Magnetic cores; Magnetic materials; Shape; Silicon; Stator cores; Substrates; Teeth;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 1996, MEMS '96, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE, The Ninth Annual International Workshop on
Conference_Location :
San Diego, CA
Print_ISBN :
0-7803-2985-6
Type :
conf
DOI :
10.1109/MEMSYS.1996.494002
Filename :
494002
Link To Document :
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