Modular concept for fluid handling systems. A demonstrator micro analysis system

A modular planar concept for fluid handling microsystems is presented. The concept is based on a planar Mixed Circuit Board with electrical and fluidic interconnections acting as a substrate for sensor and actuator modules. Several modules realised within this concept are presented, and the design as well as modelling and simulation of the fluidic components and systems is discussed. Furthermore, the general application of this concept in micro analysis systems is considered. Finally, the modular concept is demonstrated by a micro chemical analysis system containing micro-pumps, flow sensors, an optical absorption cell and control electronics