• DocumentCode
    3441995
  • Title

    Piezoelectric RF MEMS tunable capacitor with 3V operation using CMOS compatible materials and process

  • Author

    Kawakubo, T. ; Nagano, T. ; Nishigaki, M. ; Abe, K. ; Itaya, K.

  • Author_Institution
    Toshiba Res. Consulting Corp., Kawasaki
  • fYear
    2005
  • fDate
    5-5 Dec. 2005
  • Firstpage
    294
  • Lastpage
    297
  • Abstract
    A RF MEMS tunable capacitor having a piezoelectric bimorph actuator was developed using a CMOS compatible surface micromachining process. Folded beam piezoelectric actuators were introduced to cancel carling. Its continuous wide tuning ratio of 3 was realized at less than 3 V operations for the first time
  • Keywords
    capacitors; circuit tuning; micromachining; piezoelectric actuators; 3 V; CMOS compatible materials; CMOS compatible process; RF MEMS tunable capacitor; piezoelectric bimorph actuator; piezoelectric capacitor; surface micromachining; CMOS process; Capacitors; Electrodes; Micromechanical devices; Piezoelectric actuators; Piezoelectric devices; Piezoelectric materials; Radiofrequency microelectromechanical systems; Residual stresses; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 2005. IEDM Technical Digest. IEEE International
  • Conference_Location
    Washington, DC
  • Print_ISBN
    0-7803-9268-X
  • Type

    conf

  • DOI
    10.1109/IEDM.2005.1609332
  • Filename
    1609332
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3441995