Title :
Sims analytical technique for PV applications
Author :
Peres, P. ; Merkulov, A. ; Desse, F. ; Schuhmacher, M.
Author_Institution :
CAMECA, Gennevilliers, France
Abstract :
This paper presents analytical performance provided by SIMS tools for the development and manufacturing of new solar cells. Results for two main applications are presented: trace element analysis in PV Si feedstock with detection limits from the ppm down to the ppb range (depending on the species to be analyzed) for light elements (C, O, N), main Si dopants (B, P, As) and metals ; in-depth distribution of main components and trace elements in CIGS thin films.
Keywords :
arsenic; boron; elemental semiconductors; phosphorus; silicon; solar cells; PV Si feedstock; PV applications; SIMS analytical technique; Si dopants; Si:As; Si:B; Si:P; in-depth distribution; light elements; solar cells; thin films; Artificial intelligence; Impurities; Interference elimination; Iron; Manufacturing; Mass spectroscopy; Monitoring; Photovoltaic cells; Pollution measurement; Silicon;
Conference_Titel :
Photovoltaic Specialists Conference (PVSC), 2009 34th IEEE
Conference_Location :
Philadelphia, PA
Print_ISBN :
978-1-4244-2949-3
Electronic_ISBN :
0160-8371
DOI :
10.1109/PVSC.2009.5411316
