DocumentCode
3443199
Title
Telemetric surface acoustic wave chemical sensors
Author
Fischerauer, G. ; Dickert, F.L. ; Sikorski, R.
Author_Institution
Siemens AG, Munich, Germany
fYear
1998
fDate
27-29 May 1998
Firstpage
608
Lastpage
614
Abstract
The present paper deals with surface acoustic wave (SAW) chemical sensors that operate without power supply and can be read wirelessly by electromagnetic interrogation signals. These novel chemical sensors are based on the well-known SAW identification (ID) tag principle with a sensitive coating applied to the device surface. It is shown that a gas detection limit of a few ppm to some hundred ppm requires a reflector time distance of several microseconds, corresponding to a spatial distance of typically 10 mm. This relatively large device geometry places an upper limit on the additional insertion attenuation caused by the sensitive layer and restricts the possible coating materials. As a practical demonstration, we have designed and investigated a humidity sensor at 433.92 MHz a frequency band allotted to industrial, scientific, and medical apparatus in Germany. The measured return loss without sensitive layer was between 20 and 25 dB. A coating of cross-linked polyvinyl alcohol served as sensitive layer, the thickness of which was kept at 3 to 10 nm. With these devices, relative humidity changes of a few percent are detected quite easily. This illustrates the fact that telemetric SAW chemical sensors ran actually be realized
Keywords
chemical sensors; humidity sensors; surface acoustic wave sensors; telemetry; 10 mm; 20 to 25 dB; 3 to 10 nm; 433.92 MHz; Germany; H2O; SAW identification; cross-linked polyvinyl alcohol; electromagnetic interrogation signals; frequency band; humidity sensor; measured return loss; reference sensor; relative humidity; sensitive layer; spatial distance; surface acoustic wave chemical sensors; telemetric sensors; Acoustic signal detection; Acoustic waves; Chemical sensors; Coatings; Electromagnetic scattering; Humidity; Power supplies; Surface acoustic wave devices; Surface acoustic waves; Telemetry;
fLanguage
English
Publisher
ieee
Conference_Titel
Frequency Control Symposium, 1998. Proceedings of the 1998 IEEE International
Conference_Location
Pasadena, CA
ISSN
1075-6787
Print_ISBN
0-7803-4373-5
Type
conf
DOI
10.1109/FREQ.1998.717963
Filename
717963
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