DocumentCode
3448248
Title
Piezoelectric KNbO3 films for SAW device applications
Author
Yamanouchi, Kazuhiko ; Odagawa, Hiroyuki ; Kojima, Toshiyuki ; Onoe, Atsushi ; Yoshida, Ayako ; Chikuma, Kiyofumi
Author_Institution
Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan
fYear
1998
fDate
27-29 May 1998
Firstpage
779
Lastpage
782
Abstract
KNbO3 films have been deposited on STO (SrTiO3 ) substrates using MOCVD techniques. The gas-grown films are sufficiently piezoelectric to fabricate SAW devices. The experimental results show the electromechanical coupling coefficients (K2) of 0.021 at the center frequency of 960 MHz and h/λ=0.24 (λ:SAW wavelength, h: film thickness of KNbO3). These values have fairly good agreements with theoretical ones calculated by using the piezoelectric constants of single crystals
Keywords
MOCVD; MOCVD coatings; piezoelectric materials; piezoelectric thin films; potassium compounds; substrates; surface acoustic wave delay lines; 960 MHz; KNbO3; KNbO3 films; MOCVD techniques; SAW device; STO; SrTiO3; SrTiO3 substrates; piezoelectric constant; piezoelectric thin films; Acoustic propagation; Apertures; Frequency; Insertion loss; Metallization; Piezoelectric films; Piezoelectric polarization; Surface acoustic wave devices; Surface acoustic waves; Transducers;
fLanguage
English
Publisher
ieee
Conference_Titel
Frequency Control Symposium, 1998. Proceedings of the 1998 IEEE International
Conference_Location
Pasadena, CA
ISSN
1075-6787
Print_ISBN
0-7803-4373-5
Type
conf
DOI
10.1109/FREQ.1998.717987
Filename
717987
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