DocumentCode
3451817
Title
Theoretical analysis of a piezoelectric thin film resonator with acoustic quarter-wave multilayers
Author
Nakamura, Kiyoshi ; Kanbara, Hirofumi
Author_Institution
Graduate Sch. of Eng., Tohoku Univ., Sendai, Japan
fYear
1998
fDate
27-29 May 1998
Firstpage
876
Lastpage
881
Abstract
The purpose of this paper is to theoretically analyse the piezoelectric thin film resonator with acoustic multilayers by considering acoustic loss, electrode thickness, and thickness deviation of respective layers including the piezoelectric film. The dependence of the resonance and antiresonance frequencies, the Q-factor, and the effective electromechanical coupling factor on resonator parameters, especially on the total number of multilayers, is discussed in contrast to the case of a piezoelectric film with traction-free surfaces
Keywords
Q-factor; acoustic impedance; acoustic resonance; crystal resonators; multilayers; piezoelectric thin films; acoustic loss; acoustic multilayers; acoustic quarter-wave multilayers; electrode thickness; piezoelectric thin film resonator; thickness deviation; Acoustic devices; Acoustic waves; Electrodes; Equivalent circuits; Frequency; Nonhomogeneous media; Piezoelectric films; Substrates; Surface acoustic wave devices; Surface impedance;
fLanguage
English
Publisher
ieee
Conference_Titel
Frequency Control Symposium, 1998. Proceedings of the 1998 IEEE International
Conference_Location
Pasadena, CA
ISSN
1075-6787
Print_ISBN
0-7803-4373-5
Type
conf
DOI
10.1109/FREQ.1998.718003
Filename
718003
Link To Document