Title :
Nano-dot array formation using nano-jet probe for photonics application
Author :
Ohkouchi, S. ; Nakamura, Y. ; Nakamura, H. ; Asakawa, K.
Keywords :
Apertures; Atomic force microscopy; Gallium arsenide; Instruments; Molecular beam epitaxial growth; Photonics; Quantum computing; Scanning electron microscopy; Scanning probe microscopy; Voltage;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN :
4-99024720-5
DOI :
10.1109/IMNC.2004.245707