DocumentCode
3452124
Title
Nano-dot array formation using nano-jet probe for photonics application
Author
Ohkouchi, S. ; Nakamura, Y. ; Nakamura, H. ; Asakawa, K.
fYear
2004
fDate
Oct. 27-29, 2004
Firstpage
32
Lastpage
33
Keywords
Apertures; Atomic force microscopy; Gallium arsenide; Instruments; Molecular beam epitaxial growth; Photonics; Quantum computing; Scanning electron microscopy; Scanning probe microscopy; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN
4-99024720-5
Type
conf
DOI
10.1109/IMNC.2004.245707
Filename
1459457
Link To Document