• DocumentCode
    3452124
  • Title

    Nano-dot array formation using nano-jet probe for photonics application

  • Author

    Ohkouchi, S. ; Nakamura, Y. ; Nakamura, H. ; Asakawa, K.

  • fYear
    2004
  • fDate
    Oct. 27-29, 2004
  • Firstpage
    32
  • Lastpage
    33
  • Keywords
    Apertures; Atomic force microscopy; Gallium arsenide; Instruments; Molecular beam epitaxial growth; Photonics; Quantum computing; Scanning electron microscopy; Scanning probe microscopy; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
  • Print_ISBN
    4-99024720-5
  • Type

    conf

  • DOI
    10.1109/IMNC.2004.245707
  • Filename
    1459457