Title :
Piezoelectric Parylene-C MEMS microphone
Author :
Kim, J.Y.-H. ; Liu, Yanbing ; Scianmarello, N. ; Tai, Y.C.
Author_Institution :
Currently DMC R&D center, Samsung Elec. Co. Ltd., Suwon, South Korea
Abstract :
There has long been a strong interest in the use of thin-film piezoelectric materials for MEMS microphones and actuators. However, well-known thin-film piezoelectric materials all have different degrees of technological difficulties for MEMS integration. Here, we demonstrated the first piezoelectric Parylene-C (PA-C) based MEMS microphone with a diaphragm 6mm in diameter and 30μm in thickness. The dynamic range spans from less than 30 dB to above 110 dB SPL and the open-circuit sensitivity is 1-110 μV/Pa over an audio frequency 1-10 kHz. The total harmonic distortion of the device is less than 20% at 110 dB SPL and 1 kHz.
Keywords :
diaphragms; harmonic distortion; micromechanical devices; microphones; piezoelectric devices; MEMS microphones; diaphragm; dynamic range; frequency 1 kHz to 10 kHz; piezoelectric Parylene-C MEMS microphone; size 30 mum; size 6 mm; thin film piezoelectric material; total harmonic distortion; Adhesives; Electrodes; Micromechanical devices; Microphones; Piezoelectric materials; Polymers; Surface treatment; MEMS; Microphone; Parylene-C; Piezoelectric Microphone;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6626695
