Title :
Formation of iron nano-dots by electron beam induced deposition using an ultrahigh vacuum transmission electron microscope
Author :
Tanaka, M. ; Chu, F. ; Shimojo, M. ; Takeguchi, M. ; Furuya, K.
Keywords :
Annealing; Electron beams; Fabrication; Iron; Materials science and technology; Pollution measurement; Probes; Scanning electron microscopy; Substrates; Transmission electron microscopy;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN :
4-99024720-5
DOI :
10.1109/IMNC.2004.245722