Title :
Copper(II) oxide nanowire array hydrogen sensor via facile large area contact integration
Author :
Limkrailassiri, K. ; Kozinda, A. ; Lin, Li-Chiun
Author_Institution :
Berkeley Sensor & Actuator Center, Univ. of California, Berkeley, Berkeley, CA, USA
Abstract :
This paper presents a novel method to achieve large area contact integration for copper(II) oxide (CuO) nanowire array-based hydrogen gas sensors, which provides a simple solution to the ongoing challenge of harvesting nanostructured materials for gas sensing applications. The method presented herein offers six distinct advantages over previous nanostructured gas sensing technologies: (1) convenient electrical access to as-grown, freestanding nanowire arrays, thereby obviating postgrowth thin-film metallization, (2) lithography-free fabrication, (3) usage of large area nanowire arrays to circumvent low yield of single nanowire sensors, (4) reusability of contacts for batch characterization, (5) compatibility with all free-standing arrays grown on electrically conductive substrates, and (6) rapid response and recovery times. The CuO nanowire array-based gas sensors exhibited 5× to 25× increased resistance during operation, and a 20× improvement in recovery time compared to prior works.
Keywords :
copper compounds; gas sensors; hydrogen; metallisation; nanosensors; nanowires; CuO; H2; copper(II) oxide nanowire array; electrically conductive substrates; facile large area contact integration; hydrogen gas sensors; lithography-free fabrication; postgrowth thin-film metallization; Arrays; Contacts; Gas detectors; Hydrogen; Nanoscale devices; Resistance; Hydrogen; contact integration; copper oxide; gas sensor; nanowires;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6626736