DocumentCode :
3453021
Title :
Characteristics of Mo/Ru/Si multilayer reflector structure
Author :
Kim, Tae Geun ; Kim, Woo Sam ; Kang, In-Yong ; Yong-Chae Chung ; Ahn, Jinho
fYear :
2004
fDate :
Oct. 27-29, 2004
Firstpage :
100
Lastpage :
101
Keywords :
Annealing; Atomic measurements; Ceramics; Commercialization; Heating; Lithography; Nonhomogeneous media; Optical films; Reflectivity; Ultraviolet sources;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN :
4-99024720-5
Type :
conf
DOI :
10.1109/IMNC.2004.245743
Filename :
1459493
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3453021
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