Nanoirnprint of glass materials with glassy carbon mold fabricated by focused-lon-beam etching

Author

Takahashi, Masaham ; Sugimoto, Kohichi ; Maeda, Ryutaro

fYear

2004

fDate

Oct. 27-29, 2004

Firstpage

122

Lastpage

123

Keywords

Dry etching; Embossing; Glass; Heating; Machining; Micromechanical devices; Nanostructured materials; Organic materials; Temperature; Wet etching;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International

Print_ISBN

4-99024720-5

Type

DOI

10.1109/IMNC.2004.245754

Filename

1459504

Link To Document