DocumentCode :
3453520
Title :
Nanochannels for DNA stretching fabricated by standard cleanroom processing and nanoimprint lithography
Author :
Bilenberg, Brian ; Pastore, Carine ; Nielsen, Theodor ; Enghoff, Simon Riis ; Jeppesen, Claus ; Larsen, Asger Vig ; Kristensen, Anders
fYear :
2004
fDate :
Oct. 27-29, 2004
Firstpage :
134
Lastpage :
135
Keywords :
DNA; Etching; Fabrication; Lab-on-a-chip; Nanolithography; Oxidation; Polymer films; Resists; Silicon; Substrates;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN :
4-99024720-5
Type :
conf
DOI :
10.1109/IMNC.2004.245760
Filename :
1459510
Link To Document :
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