DocumentCode :
3453536
Title :
Static and noise characterization of deep submicron CMOS devices
Author :
Zimmermann, Jacques ; Ghibaudo, Gérard
Author_Institution :
Lab. de Phys. des Composants a Semicond., ENSERG, Grenoble, France
fYear :
1995
fDate :
11-14 Oct 1995
Firstpage :
521
Lastpage :
529
Abstract :
Today, 0.35 μm CMOS technologies have been brought up to integrated circuit mass production. The trend for the next two years is to implement the forthcoming 0.25 μm CMOS and the 0.18 μm CMOS technologies. Thus deep submicron CMOS is a reality from the standpoint of the CMOS IC market as a very well mastered device. Nevertheless, this device still is an object of interest for applied physicists and engineers since new and interesting phenomena show up (e.g. random telegraph signal or RTS), that are believed to be at the source of enhanced excess noises commonly observed in them. Due to the importance played by noise in analogue circuits applications, specific noise studies have been made of these devices. The present paper provides a summary of the actual knowledge on this topic
Keywords :
CMOS integrated circuits; carrier mobility; fluctuations; integrated circuit measurement; integrated circuit noise; 0.18 to 0.35 micron; IC mass production; LF noise characterization; RTS measurement; deep submicron CMOS devices; excess noise; integrated circuits; random telegraph signal; static characterization; Electron beams; Electronic switching systems; Fluctuations; Lithography; Low-frequency noise; MOSFETs; Measurement standards; Rain; Threshold voltage; Vents;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Conference, 1995. CAS'95 Proceedings., 1995 International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-2647-4
Type :
conf
DOI :
10.1109/SMICND.1995.495074
Filename :
495074
Link To Document :
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