Title :
High-Performance Nanomechanical Oscillators Fabricated by Bottom-up Integration of Silicon Nanowires
Author :
Li, Mingwei ; Bhiladvala, Rustom B. ; Sioss, James A. ; Lew, Kok-Keong ; Redwing, Joan M. ; Keating, Christine D. ; Mayer, Theresa S.
Author_Institution :
Department of Electrical Engineering, The Pennsylvania State University, University Park, PA 16802, USA
Keywords :
Frequency; Gold; Laser beams; Nanoparticles; Nanowires; Oscillators; Q factor; Resists; Resonance; Silicon;
Conference_Titel :
Device Research Conference, 2006 64th
Conference_Location :
State College, PA, USA
Print_ISBN :
0-7803-9748-7
DOI :
10.1109/DRC.2006.305049
