Title :
Mechanical coupling of dual breathe-mode ring resonator
Author :
Yang, Yi ; Ng, Eldwin Jiaqiang ; Ahn, Chong H. ; Hong, Vu A. ; Ahadi, E. ; Kenny, Thomas W.
Author_Institution :
Mech. Eng. Dept., Stanford Univ., Stanford, CA, USA
Abstract :
We present results from models and measurements showing the emergence of coupling between elements of a micromechanical resonator. By tuning the dimensions of one element, we observe variations in the characteristics of the modes (e.g. frequency, quality factor) that are consistent with models. These results are useful for the design of complex, coupled-element resonators for oscillators and inertial sensors.
Keywords :
micromechanical resonators; tuning; vibrations; coupled element resonator; dual breathe mode ring resonator; inertial sensor; mechanical coupling; micromechanical resonator; oscillator application; Acoustic beams; Couplings; Encapsulation; Micromechanical devices; Optical ring resonators; Resonant frequency; Silicon; Coupling; Epi-seal encapsulation; Resonators;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6626813
