DocumentCode :
3454780
Title :
Segmented electrode excitation of aluminum nitride contour mode resonators to optimize the device figure of merit
Author :
Cassella, Cristian ; Segovia-Fernandez, Jeronimo ; Piazza, Gianluca
Author_Institution :
Carnegie Mellon Univ., Pittsburgh, PA, USA
fYear :
2013
fDate :
16-20 June 2013
Firstpage :
506
Lastpage :
509
Abstract :
This paper presents a new electrode configuration for a more efficient excitation of mechanical vibrations in aluminum nitride contour-mode MEMS resonators. We call this technique the segmented electrode excitation. This excitation method results in up to 40% improvement in the figure of merit (FoM) of the resonator, nominally the product of the electromechanical coupling coefficient, kt2, and quality factor, Q. The segmented electrode configuration is based on the idea of implementing efficient sampling of the charge developed during vibrations, while reducing the electrode coverage. The reduction in electrode coverage ensures that the resonator exhibits a higher Q as interfacial losses are reduced. The efficient sampling enables attaining a kt2 comparable to a conventional metal coverage design.
Keywords :
III-V semiconductors; Q-factor; aluminium compounds; crystal resonators; electrodes; micromechanical resonators; vibrations; wide band gap semiconductors; AlN; aluminum nitride contour mode MEMS resonators; device figure of merit; electrode configuration; electromechanical coupling coefficient; mechanical vibrations; quality factor; segmented electrode excitation; Electrodes; Fingers; III-V semiconductor materials; Metals; Micromechanical devices; Piezoelectric transducers; Vibrations;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
Type :
conf
DOI :
10.1109/Transducers.2013.6626814
Filename :
6626814
Link To Document :
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