Title :
Vertical (3-D) flash memory with SiGe nanocrystal floating gate
Author :
Sarkar, J. ; Dey, S. ; Liu, Y. ; Shahrjerdi, D. ; Kelly, D.Q. ; Banerjee, S.K.
Author_Institution :
Microelectronics Research Center & Department of Electrical & Computer Engineering, 10100 Burnet Road, Bldg 160, Mail code 9950, The University of Texas at Austin, TX 78758. Email: jsarkar@ece.utexas.edu, Phone: 512 471 3706, Fax: 512 232 2893
Keywords :
Computer architecture; Flash memory; Germanium silicon alloys; Microelectronics; Nanocrystals; Nonvolatile memory; Postal services; Self-assembly; Silicon germanium; Substrates;
Conference_Titel :
Device Research Conference, 2006 64th
Conference_Location :
State College, PA, USA
Print_ISBN :
0-7803-9748-7
DOI :
10.1109/DRC.2006.305176
