DocumentCode :
3455585
Title :
Fabrication Of Poly-silicon Tft On The Glass Substrate By Metal-induced Lateral Crystallization
Author :
Kim, Tae-Kyung ; Lee, Byung-II ; Kim, Kwang-Ho ; Shin, Jin-Wook ; Pyung-Soo Ahn ; Jeong, Won-Cheol ; Joo, Seung-Ki
fYear :
1997
fDate :
13-14 Feb 1997
Firstpage :
61
Lastpage :
62
Keywords :
Annealing; Contamination; Crystallization; Fabrication; Glass; Liquid crystals; Nickel; Sputtering; Substrates; Thin film transistors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Information Display, 1997., Proceedings of the Fourth Asian Symposium on
Print_ISBN :
962-8273-01-9
Type :
conf
DOI :
10.1109/ASID.1997.631398
Filename :
631398
Link To Document :
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