Title :
Silicon nanowire based ring shape force sensor for sensorized guidewires
Author :
Han, Bo ; Yoon, Young-Joong ; Hamidullah, M. ; Lin, A.T.-H. ; Park, W.-T.
Author_Institution :
Inst. of Microelectron., A*STAR, Singapore, Singapore
Abstract :
This paper presents the development of a ring shaped force sensor for sensorized guidewire applications. The sensor comprises a suspended ring structure located at the center of four suspended beams that can be integrated on the distal tip of a guidewire. SiNWs with a length of 6 μm and a cross section of 90 nm × 90 nm are embedded at the anchor of each silicon bridge as the piezoresistive sensing elements. Taking advantage of the high sensitivity of SiNWs, the fabricated sensor was capable to detect small displacement in nm ranges with a sensitivity of 13.4 × 10-3 μm-1 in the z-direction. This force sensor showed high linearity (>99.9%) to the applied load and no obvious hysteresis was observed.
Keywords :
beams (structures); elemental semiconductors; force sensors; nanosensors; nanowires; piezoresistive devices; silicon; suspensions; Si; bridge anchor; displacement detection; guidewire distal tip; nanowire based ring shape force sensor; piezoresistive sensor; sensor linearity; sensorized guidewire application; size 6 mum; size 90 nm; suspended beams; suspended ring structure; Force sensors; Hysteresis; Loading; Piezoresistance; Robot sensing systems; Silicon; Silicon nanowire; guidewire; minimally invasive surgery; triaxial force sensor;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6626867