Pyroelectric electron emission from a thin film of PbZrxTi1−xO3 on a nanofabricated cathode

Author

Fletcher, P.C. ; Mangalam, R.V.K. ; Martin, L.W. ; King, William P.

Author_Institution

Dept. of Mech. Sci. & Eng., Univ. of Illinois, Urbana, IL, USA

fYear

2013

fDate

16-20 June 2013

Firstpage

772

Lastpage

775

Abstract

We report pyroelectric emission from thin films of crystalline PbZr_0.8Ti_0.2O₃ (PZT) on nanometer-sharp tips. The epitaxial PZT films are 30 nm thick and grown directly on batch fabricated single-crystal silicon tips. Pyroelectric emission occurs for heating rates ≥ 50 °C/min in a 20 V/μm external field, and for electric field strengths ≥ 6.7 V/μm when heated at 100 °C/min. The emitted electric charge is reasonable when compared to the theoretical maximum charge for this PZT film and these testing parameters. We calculate that a heating rate of 4.0×10⁷ °C/min is necessary for unassisted pyroelectric emission.

Keywords

electron field emission; epitaxial layers; heat treatment; lead compounds; nanostructured materials; pyroelectricity; PbZr_0.8Ti_0.2O₃; crystalline PZT thin films; electric field strengths; epitaxial PZT films; heating rates; nanofabricated cathode; nanometer-sharp tips; pyroelectric electron emission; Anodes; Cathodes; Electric fields; Electron emission; Films; Resistance heating; PZT; Pyroelectric; electron emission; tip array;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6626880

Filename

6626880