Title :
Fabrication of hfc coated Si field emitter arrays with a built-in poly-Si TFT
Author :
Nagao, M. ; Sacho, Y. ; Kanemaru, S. ; Matsukawa, T. ; Itoh, J.
Keywords :
Active matrix technology; Argon; Fabrication; Field emitter arrays; Flat panel displays; Glass; Hybrid fiber coaxial cables; Niobium; Temperature; Thin film transistors;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN :
4-99024720-5
DOI :
10.1109/IMNC.2004.245628