DocumentCode :
3457001
Title :
A smart acoustic emission and mechanical impedance hybrid sensor with static force detecting and dynamic measuring capabilities
Author :
Guo-Hua Feng ; Zhi-Wei Huang
Author_Institution :
Dept. of Mech. Eng., Nat. Chung Cheng Univ., Chiayi, Taiwan
fYear :
2013
fDate :
16-20 June 2013
Firstpage :
936
Lastpage :
939
Abstract :
This paper presents a state-of-the-art intelligent acoustic emission (AE) and mechanical impedance hybrid sensor (Fig. 1). The sensor can be operated in two modes: 1) sensing acoustic waves emitted from an external source with the function of being able to detect the static force at installation; 2) measuring the mechanical impedance of the interested object/material by exerting a dynamic force on the object and sensing its feedback velocity. This unique sensor is composed of three major core elements: a micromachined wavy-shaped sensing element made with multi-layer piezoelectric polymer (PVDF) films; a micromachined strain gage made on a patterned SU-8 flexible substrate for force/velocity detection; a diced PZT plate for AE sensing and AE coupling to PVDF element. The device working principle, fabrication and testing are described in the text. Experimental results of pencil lead fracture and material characterization demonstrate the functionality of the developed sensor.
Keywords :
acoustic devices; acoustic emission; acoustic impedance; force measurement; force sensors; fracture mechanics; intelligent sensors; micromachining; microsensors; piezoelectric devices; polymer films; strain gauges; AE coupling; PZT; device fabrication; device testing; device working principle; diced PZT plate; dynamic force measurement capability; mechanical impedance hybrid sensor; mechanical impedance measurement; micromachined strain gage; micromachined wavy shaped sensing element; multilayer PVDF film; patterned SU-8 flexible substrate; pencil lead fracture; piezoelectric polymer; smart acoustic emission sensor; static force detection; velocity detection; Acoustic emission; Force; Impedance; Impedance measurement; Mechanical variables measurement; Sensors; Strain; Acoustic emission; force detection; mechanical impedance; sensor;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
Type :
conf
DOI :
10.1109/Transducers.2013.6626922
Filename :
6626922
Link To Document :
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