Multi-axial tactile sensor with micro-cantilever embedded in hemispherical elastomer for surface texture measurement

Author

Watanabe, K. ; Sohgawa, Masayuki ; Kanashima, Takeshi ; Okuyama, Masanori ; Noma, Haruo ; Azuma, Teruaki

Author_Institution

Osaka Univ., Suita, Japan

fYear

2013

fDate

16-20 June 2013

Firstpage

1012

Lastpage

1015

Abstract

We have fabricated the multi-axial tactile sensor which has micro-cantilevers with strain gauge film on Si embedded in hemispherical elastomer, and various kinds of papers have been identified by active touch. Transient responses of the resistance change have been obtained when the sensor was pushed and moved on various kinds of blank papers successively. Some features are extracted from the response by a principal component analysis and the papers are classified in several clusters.

Keywords

cantilevers; elastomers; feature extraction; microsensors; paper; principal component analysis; surface texture; tactile sensors; transient response; feature extraction; hemispherical elastomer; microcantilevers; multiaxial tactile sensor; papers; principal component analysis; strain gauge film; surface texture measurement; transient responses; Force; Rough surfaces; Surface resistance; Surface roughness; Tactile sensors; Active touch; Elastomer; MEMS; Principal component analysis; Tactile sensor; Texture identification;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6626941

Filename

6626941