A new metallic glass Fe-B-Nd-Nb thin film material for micro sensors and actuators: Fabrication and characterization

Author

Tuan, P.A. ; Oguchi, H. ; Hara, Masaki ; Shikida, Mitsuhiro ; Hida, Hirotaka ; Ando, Takehiro ; Sato, Kiminori ; Kuwano, Hiroki

Author_Institution

Tohoku Univ., Sendai, Japan

fYear

2013

fDate

16-20 June 2013

Firstpage

1040

Lastpage

1043

Abstract

In the first half of this paper we reports on the development of a Fe-B-Nd-Nb quaternary alloy magnetic metallic glass thin film. The Fe-B-Nd-Nb thin film deposited on the Si (100) substrate underwent crystallographic and thermal characterization to confirm its metallic glass state. In the second half of this paper we reports on the direct fracture toughness of the micro structure composed of the Fe-B-Nd-Nb metallic glass thin film using the micro device specially designed. The measurement revealed that the fracture toughness of the Fe-B-Nd-Nb metallic glass thin film is 6.4 MPa·m^1/2, which is about four times higher than that of silicon.

Keywords

amorphous magnetic materials; boron alloys; crystal microstructure; fracture toughness; iron alloys; magnetic thin films; metallic glasses; metallic thin films; microactuators; microsensors; neodymium alloys; niobium alloys; thermal analysis; FeBNdNb; Si; Si (100) substrate; crystallographic characterization; fracture toughness; microactuators; microsensors; quaternary alloy magnetic metallic glass thin film; thermal characterization; thin film microstructure; Actuators; Amorphous magnetic materials; Force; Glass; Magnetic films; Magnetic hysteresis; Silicon; MEMS; fracture toughness; metallic glass thin film;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6626948

Filename

6626948