Title :
Enhanced perfomance of sensor/actuator integrated piezoelectric microcantilever by using tetragonal compositon PZT thin films
Author :
Kobayash, T. ; Makimoto, N. ; Funakubo, H. ; Oikawa, Takanori ; Wada, Atsushi ; Itoh, Takayuki ; Maeda, Ryutaro
Author_Institution :
Nat. Inst. of Adv. Ind. Sci. & Technol. (AIST), Tsukuba, Japan
Abstract :
We have largely enhanced the performance of sensor/actuator integrated piezoelectric microcantilevers for electrostatic field sensors, by using tetragonal composition Pb(Zr0.3, Ti0.7)O3 (tetr-PZT) thin films instead of MPB composition Pb(Zr0.52, Ti0.48)O3 (MPB-PZT) ones. We have succeeded in optimizing wake-up condition to enhance the piezoelectric property of the tetra-PZT thin films. The maximum output voltage of the sensor/actuator integrated microcantilevers is about 6 times larger than those using MPB-PZT thin films.
Keywords :
cantilevers; electric field measurement; lead compounds; microactuators; microsensors; piezoelectric actuators; PZT; electrostatic field sensor; piezoelectric property; sensor-actuator integrated piezoelectric microcantilever; tetragonal compositon thin films; wake-up condition optimization; Actuators; Dielectric constant; Dielectric losses; Electrodes; Electrostatics; Micromechanical devices; Voltage measurement; PZT; Piezoelectric MEMS; tetragonal; wake-up;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6627158
