Enhanced perfomance of sensor/actuator integrated piezoelectric microcantilever by using tetragonal compositon PZT thin films

Author

Kobayash, T. ; Makimoto, N. ; Funakubo, H. ; Oikawa, Takanori ; Wada, Atsushi ; Itoh, Takayuki ; Maeda, Ryutaro

Author_Institution

Nat. Inst. of Adv. Ind. Sci. & Technol. (AIST), Tsukuba, Japan

fYear

2013

fDate

16-20 June 2013

Firstpage

1879

Lastpage

1882

Abstract

We have largely enhanced the performance of sensor/actuator integrated piezoelectric microcantilevers for electrostatic field sensors, by using tetragonal composition Pb(Zr_0.3, Ti_0.7)O₃ (tetr-PZT) thin films instead of MPB composition Pb(Zr_0.52, Ti_0.48)O₃ (MPB-PZT) ones. We have succeeded in optimizing wake-up condition to enhance the piezoelectric property of the tetra-PZT thin films. The maximum output voltage of the sensor/actuator integrated microcantilevers is about 6 times larger than those using MPB-PZT thin films.

Keywords

cantilevers; electric field measurement; lead compounds; microactuators; microsensors; piezoelectric actuators; PZT; electrostatic field sensor; piezoelectric property; sensor-actuator integrated piezoelectric microcantilever; tetragonal compositon thin films; wake-up condition optimization; Actuators; Dielectric constant; Dielectric losses; Electrodes; Electrostatics; Micromechanical devices; Voltage measurement; PZT; Piezoelectric MEMS; tetragonal; wake-up;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6627158

Filename

6627158