Title :
A dome shaped piezoelectric tactile sensor array using controlled inflation technique
Author :
Kim, Myung Su ; Jo, S.E. ; Kang, D.H. ; Ahn, H.R. ; Kim, Yong Jun
Author_Institution :
Sch. of Mech. Eng., Yonsei Univ., Seoul, South Korea
Abstract :
The paper reports a dome shaped piezoelectric tactile sensor to improve the sensitivity, and a fabrication technique of the sensor. By applying dome shaped cell instead of conventional flat shaped cell using inflation technique, the proposed tactile sensor shows high sensitivity due to increase cell deformation when contact force was applied. The fabricated tactile sensor can successfully detect the contact force with stable frequency response (0.021V/mN), and the sensitivity of proposed sensor was improved 35% greater than that of conventional flat shaped tactile sensor.
Keywords :
piezoelectric transducers; sensor arrays; tactile sensors; cell deformation; contact force; controlled inflation technique; dome shaped piezoelectric tactile sensor array; flat shaped tactile sensor cell; Electrodes; Fabrication; Films; Force; Sensitivity; Shape; Tactile sensors; Dome shaped tactile sensor; Inflation technique; Piezoelectric;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6627161