Title :
Microfabrication and characterization of fully programmable optical MEMS gratings with long low-stress micro-mirrors
Author :
Timotijevic, B. ; Tormen, M. ; Lockhart, Robert ; Lutzelschwab, M. ; Stanley, R.P. ; Zamkotsian, Frederic ; Lanzoni, Patrick ; Canonica, Michael ; Noell, Wilfried
Author_Institution :
Swiss Centre of Electron. & Microtechnol. (CSEM), Neuchatel, Switzerland
Abstract :
We have fabricated and characterized fully programmable MEMS diffraction gratings with long, low-stress, low cross-talk and optically flat micro-mirrors, which can be vertically displaced up to 0.7μm.
Keywords :
diffraction gratings; micro-optomechanical devices; micromirrors; optical fabrication; low-stress micromirrors; microfabrication; optically flat micromirrors; programmable optical MEMS gratings; Diffraction; Diffraction gratings; Gratings; Micromechanical devices; Mirrors; Optical crosstalk; Optical filters; MEMS; diffraction grating; micro-mirror;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
Conference_Location :
Istanbul
Print_ISBN :
978-1-4577-0334-8
DOI :
10.1109/OMEMS.2011.6031052
