DocumentCode :
3461414
Title :
Enhanced CF4 plasma treated polymer film for flexible display application
Author :
Tortissier, G. ; Kim, Bumki ; Fujita, Hideaki ; Toshiyoshi, Hiroshi ; Ginet, P.
Author_Institution :
Inst. of Ind. Sci., Univ. of Tokyo, Tokyo, Japan
fYear :
2011
fDate :
8-11 Aug. 2011
Firstpage :
169
Lastpage :
170
Abstract :
A MEMS flexible display device, based on transparent and flexible PEN substrate, is fabricated by inkjet printing associated with CF4 plasma surface treatment.
Keywords :
carbon compounds; flexible displays; ink jet printing; plasma materials processing; polymer films; surface treatment; CF4; MEMS flexible display device; PEN substrate; flexible displays; inkjet printing; plasma surface treatment; plasma treated polymer film; Color; Plasmas; Printing; Rough surfaces; Substrates; Surface roughness; Surface treatment; CF4 Plasma etching; Flexible MEMS; Inkjet printing; color pixel;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
Conference_Location :
Istanbul
ISSN :
2160-5033
Print_ISBN :
978-1-4577-0334-8
Type :
conf
DOI :
10.1109/OMEMS.2011.6031054
Filename :
6031054
Link To Document :
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