Title :
A high speed MEMS scanner for 140-kHz SS-OCT
Author :
Isamoto, K. ; Totsuka ; Suzuki, Takumi ; Sakai, Tadashi ; Morosawa, A. ; Changho Chong ; Fujita, Hideaki ; Toshiyoshi, Hiroshi
Author_Institution :
Santec Corp., Komaki, Japan
Abstract :
We present an electrostatic vertical comb-drive MEMS optical scanner with the angle magnifier mechanism developed for a 140-kHz wavelength tunable-laser in the swept-source OCT system of a 2 ms/frame visualization capability.
Keywords :
bioMEMS; biomedical equipment; laser applications in medicine; optical scanners; optical tomography; SS-OCT; angle magnifier mechanism; electrostatic vertical comb-drive MEMS optical scanner; frequency 140 kHz; high speed MEMS scanner; swept-source OCT system; tunable-laser; visualization capability; Actuators; Biomedical optical imaging; High speed optical techniques; Micromechanical devices; Mirrors; Optical device fabrication; Optical imaging; OCT; electrostatic vertical comb; optical scanner; wavelength tunable laser;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2011 International Conference on
Conference_Location :
Istanbul
Print_ISBN :
978-1-4577-0334-8
DOI :
10.1109/OMEMS.2011.6031072
