Title :
A continuously tunable size-based filter
Author :
Chang, H.L. ; Chen, F.L. ; Ye, Feng ; Hong, S.J. ; Yuan, W.Z. ; Tai, Y.C.
Author_Institution :
Northwestern Polytech. Univ., Xi´an, China
Abstract :
In this paper we present a MEMS filter with continuously tunable pore size using a mirosieve-couple structure. The shape of the pore can be rectangular or square, while the size of the pore can be continuously tuned from a few microns to 200 microns dynamically. As far as we know, this is the largest tunable range among all the reported cell or microparticle sorters. The functionality of the tunable pore filter is validated using microbeads.
Keywords :
bioMEMS; biological specimen preparation; microfiltration; porous materials; MEMS filter; continuously tunable pore size; continuously tunable size based filter; microbeads; mirosieve couple structure; pore shape; Aluminum; Apertures; Filtration; Magnetic separation; Optical filters; Silicon; Sorting; Microfluidics; filter; microsieve-couple structure; tunable pore size;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6627210
