Title :
A surface-mount flexible micro-supercapacitor on ultra thin parylene-C substrate
Author :
Chen, S. ; Wang, X. ; Pu, J. ; Li, S.
Author_Institution :
Tsinghua Nat. Lab. for Inf. Sci. & Technol., Tsinghua Univ., Beijing, China
Abstract :
This paper reports a surface-mount flexible micro-supercapacitor employing a thin parylene-C membrane (10 μm) as the substrate and activated carbon (AC) as the electrodes. A thin parylene-C layer was deposited on a Si wafer by chemical vapor deposition (CVD) without silanization and then peeled off mechanically with the fabricated interdigital electrodes on it. The prototypes show a specific capacitance of 31 mF/cm2 in the solid electrolyte (PVA-H3PO4). After 15 bending cycles, no obvious degradation in capacitance was observed. The prototype without separator also have been demonstrated, after more than 40 bending cycles, the capacitance changes from 20.6 mF/cm2 to 19.3 mF/cm2 with increasing bending cycles and the capacitance retention is 93.7% which indicates that the fabricated devices have good mechanical and electrochemical stability. Our method and design offer an opportunity to apply energy storage devices for wearable electronics.
Keywords :
activated carbon; bending; capacitance; chemical vapour deposition; electrochemical electrodes; mechanical stability; membranes; polymers; solid electrolytes; supercapacitors; surface mount technology; C-Si; CVD; Si wafer; activated carbon; bending cycle; chemical vapor deposition; electrochemical stability; energy storage device; interdigital electrode fabrication; mechanical stability; solid electrolyte; specific capacitance retention; surface mount flexible microsupercapacitor; thin parylene-C membrane; ultrathin parylene-C substrate; wearable electronics; Capacitance; Electrodes; Fabrication; Particle separators; Prototypes; Silicon; Substrates; Micro-supercapacitor; flexible; parylene-C substrate; surface-mount;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7180971