DocumentCode :
3463074
Title :
Fully differential CMOS-MEMS square-plate oxide resonators with embedded poly-silicon electrodes
Author :
Chen, Wei-Cheng ; Li, Ming-Huang ; Liu, Yong-Cai ; Weinstein, D. ; Fang, Wanliang ; Li, Sheng-Shian
Author_Institution :
Dept. of Power Mech. Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan
fYear :
2013
fDate :
16-20 June 2013
Firstpage :
2292
Lastpage :
2295
Abstract :
A fully differential CMOS-MEMS square-plate oxide (SiO2) resonator with embedded polysilicon (PolySi) electrodes fabricated using a conventional 0.35 μm CMOS process has been demonstrated with Q > 4,000 and motional impedance Rm of 67.3 KΩ at 6.89 MHz. The key to attaining such performance involves leveraging high-Q materials such as SiO2 and PolySi available from the CMOS back-end-of-line stacks. The composite SiO2/PolySi structure also facilitates the electrical routing for a fully differential drive/sense configuration to suppress capacitive feedthroughs. In addition, the combination of large transduction areas and high-Q flexural-plate mode from the square-plate resonator significantly reduces Rm as compared to our previously developed CMOS-MEMS resonators. This technology paves a way toward monolithically integrated CMOS-MEMS oscillators and filters for future single-chip transceivers in wireless communications.
Keywords :
CMOS integrated circuits; electrodes; micromechanical resonators; oscillators; silicon compounds; CMOS back-end-of-line stack; SiO2; electrical routing; embedded polysilicon electrodes; frequency 6.89 MHz; fully differential CMOS-MEMS; high-Q flexural-plate mode; high-Q material; monolithically integrated CMOS-MEMS oscillator; resistance 67.3 kohm; single-chip transceiver; size 0.35 micron; square-plate oxide resonator; transduction area; wireless communication; CMOS integrated circuits; Electrodes; Frequency measurement; Materials; Metals; Optical resonators; Resonant frequency; CMOS-MEMS; Composite; Fully-Differential; Micromechanical Resonator; RF-MEMS; Square-Plate;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
Type :
conf
DOI :
10.1109/Transducers.2013.6627263
Filename :
6627263
Link To Document :
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