Title :
Nano-opto-mechanical (NOM) acoustic wavefront sensor via ring resonators
Author :
Dong, Binhong ; Cai, H. ; Tsai, Julius Minglin ; Kropelnicki, Piotr ; Randles, A.B. ; Tang, M. ; Kwong, D.L. ; Liu, A.Q.
Author_Institution :
Sch. of Electr. & Electron. Eng., Nanyang Technol. Univ., Singapore, Singapore
Abstract :
Nano-opto-mechanical systems (NOMS) based sensor is attracting widely attention due to its low cost, small footprint and good capability. Optical enabled NOMS acoustic wavefront sensor offers superior resolution and resilience to electromagnetic interference. In this paper, a novel NOMS acoustic wavefront sensor based on ring resonator array is proposed. The resonance wavelength of the ring resonator is modified by the membrane which is beneath the ring resonator can be deformed by the acoustic pressure. It has merits including high sensitivity, good linearity, CMOS compatibility and ease in integration.
Keywords :
acoustic transducers; nanosensors; resonators; CMOS compatibility; NOM acoustic wavefront sensor; electromagnetic interference resilience; nanoopto-mechanical acoustic wavefront sensor; ring resonator array; Acoustics; Optical device fabrication; Optical ring resonators; Optical sensors; Optical waveguides; Sensitivity; Silicon; Acoustic wavefront sensor; NOMS; ring resonator array;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6627273
