Title :
Advances in silicon carbide micro- and nano-electro-mechanical systems fabrication technology and applications
Author :
Mehregany, Mehran
Author_Institution :
Case Sch. of Eng., Case Western Reserve Univ., San Diego, CA, USA
Abstract :
This paper provides a background on the features and benefits of silicon carbide (SiC) semiconductor platform for microsystems applications. It then focuses on our work at Case Western Reserve University to develop and disseminate this platform technology in order to harvest its benefits for advancing instrumentation and control in operating environments that are beyond the reach of the material capabilities of silicon. We focus on highlights from our interests and pursuits in the last five years.
Keywords :
microfabrication; micromechanical devices; nanoelectromechanical devices; nanofabrication; silicon compounds; wide band gap semiconductors; SiC; microelectro-mechanical system fabrication technology; nanoelectro-mechanical system fabrication; platform technology; silicon carbide semiconductor platform; Films; Frequency measurement; Nanoelectromechanical systems; Sensors; Silicon; Silicon carbide; Switches; MEMS; Microsystems; NEMS; SiC; Silicon Carbide;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
DOI :
10.1109/Transducers.2013.6627289
