Advances in silicon carbide micro- and nano-electro-mechanical systems fabrication technology and applications

Author

Mehregany, Mehran

Author_Institution

Case Sch. of Eng., Case Western Reserve Univ., San Diego, CA, USA

fYear

2013

fDate

16-20 June 2013

Firstpage

2397

Lastpage

2402

Abstract

This paper provides a background on the features and benefits of silicon carbide (SiC) semiconductor platform for microsystems applications. It then focuses on our work at Case Western Reserve University to develop and disseminate this platform technology in order to harvest its benefits for advancing instrumentation and control in operating environments that are beyond the reach of the material capabilities of silicon. We focus on highlights from our interests and pursuits in the last five years.

Keywords

microfabrication; micromechanical devices; nanoelectromechanical devices; nanofabrication; silicon compounds; wide band gap semiconductors; SiC; microelectro-mechanical system fabrication technology; nanoelectro-mechanical system fabrication; platform technology; silicon carbide semiconductor platform; Films; Frequency measurement; Nanoelectromechanical systems; Sensors; Silicon; Silicon carbide; Switches; MEMS; Microsystems; NEMS; SiC; Silicon Carbide;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on

Conference_Location

Barcelona

Type

conf

DOI

10.1109/Transducers.2013.6627289

Filename

6627289