DocumentCode :
3463845
Title :
Design, fabrication and characterization of low-voltage piezoelectric two-axis gimbal-less microscanners
Author :
Gu-Stoppel, S. ; Janes, J. ; Quenzer, H.J. ; Hofmann, Ulrich ; Kaden, D. ; Wagner, Bernardo ; Benecke, W.
Author_Institution :
Fraunhofer Inst. for Silicon Technol. ISIT, Itzehoe, Germany
fYear :
2013
fDate :
16-20 June 2013
Firstpage :
2489
Lastpage :
2492
Abstract :
This paper presents modeling, fabrication and characterization of two designs of two-axis gimbal-less, thin-film PZT driven micromirrors with 1mm2 apertures. These micromirrors reach high frequencies for piston (21 kHz) and torsional modes (28.9 kHz) and the θopt· D product achieves up to 20.7°·mm driven by a unipolar rectangular pulse of 10 V. The combination of high frequency operation and the high driving force of the piezoelectric actuators leads to a very short reaction time. Furthermore, by combining the two adjacent torsion modes of the micromirrors circle laser beam trajectories can be realized.
Keywords :
laser beam effects; low-power electronics; microfabrication; micromirrors; PZT driven micromirrors; fabrication; frequency 21 kHz; low-voltage piezoelectric two-axis gimbal-less microscanners; micromirrors circle laser beam trajectories; modeling; piezoelectric actuators; piston; torsional modes; unipolar rectangular pulse; Actuators; Frequency measurement; Laser beams; Measurement by laser beam; Micromirrors; Resonant frequency; Trajectory; 2D micromirror; 2D microscanner; gimbal-less; piezoelectric; thin film PZT;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on
Conference_Location :
Barcelona
Type :
conf
DOI :
10.1109/Transducers.2013.6627311
Filename :
6627311
Link To Document :
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