Author :
Gulak, Glenn ; Weber, Werner
Author_Institution :
University of Toronto, Toronto, Canada
Keywords :
CMOS process; CMOS technology; Capacitance measurement; Capacitive sensors; Displacement measurement; Integrated circuit measurements; Microorganisms; Noise measurement; Paper technology; Semiconductor device measurement;
Conference_Titel :
Solid-State Circuits Conference, 2008. ISSCC 2008. Digest of Technical Papers. IEEE International
Conference_Location :
San Francisco, CA
Print_ISBN :
978-1-4244-2010-0
Electronic_ISBN :
978-1-4244-2011-7
DOI :
10.1109/ISSCC.2008.4523190
