Title :
Development and characterization of a novel two-dimensional position sensitive silicon strip detector for electron detection
Author :
Chuang, Y.J. ; Liao, Y.T. ; Lin, W.R. ; Chen, F.R. ; Chen, P.R. ; Hung, K.Y.
Author_Institution :
Ming Chuan Univ., Taoyuan, Taiwan
Abstract :
A novel silicon strip detector has been developed that has the necessary properties to provide two-dimensional position sensitivity with a moderate number of readouts and single-sided detector fabrication process. The concept is based on segmented pixel electrodes arranged in a projective X-Y readouts, it combines the 2-D position resolution of pixel electrode geometry with the simplicity of the projective readout of a double-sided strip detector. And also with proper segmentation of strip electrodes, the multi-hits induced ghost image problem can be resolved.
Keywords :
electron detection; elemental semiconductors; position sensitive particle detectors; readout electronics; silicon; silicon radiation detectors; Si; double-sided strip detector; electron detection; novel two-dimensional position sensitive silicon strip detector; projective X-Y readouts; segmented pixel electrodes; single-sided detector fabrication process; two-dimensional position sensitivity; Detectors; Electron beams; Fabrication; Microscopy; Sensitivity; Silicon; Strips; electron detector; single sided strip detector; two dimensional position sensitive;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7181143