DocumentCode :
3466038
Title :
Development of a sapphire optical wall shear stress sensor for high-temperature applications
Author :
Mills, D. ; Blood, D. ; Sheplak, M.
Author_Institution :
Interdiscipl. Microsyst. Group, Univ. of Florida, Gainesville, FL, USA
fYear :
2015
fDate :
21-25 June 2015
Firstpage :
1295
Lastpage :
1298
Abstract :
This paper presents the development of the first sapphire micromachined wall shear stress sensor for high-temperature applications utilizing geometric moiré optical transduction. A folded tether floating element structure is employed to extend the linear operating range of the sensor. Picosecond pulsed laser micro-machining processes are developed for patterning of mechanical structures in sapphire, and a four-channel alumina fiber array with sapphire optical fibers is used to interrogate the moiré fringe. Platinum thin-film gratings and a stainless steel package enable a theoretical maximum operating temperature in excess of 800°C, and initial dynamic calibration in differential mode demonstrates a shear stress sensitivity of 76.8 μV/Pa at 1.128 kHz.
Keywords :
alumina; diffraction gratings; high-speed optical techniques; laser materials processing; metallic thin films; micromachining; moire fringes; optical fibres; platinum; sapphire; sensors; stainless steel; stress measurement; Al2O3; Pt; differential mode; folded tether floating element structure; four-channel alumina fiber array; frequency 1.128 kHz; geometric moire optical transduction; high-temperature applications; initial dynamic calibration; mechanical structures; moire fringe; picosecond pulsed laser micromachining processes; platinum thin-film gratings; sapphire optical wall shear stress sensor; shear stress sensitivity; stainless steel package; theoretical maximum operating temperature; Arrays; Fabrication; Gratings; Optical fiber sensors; Optical fibers; Stress; Substrates; Sapphire; floating element; harsh environment; high-temperature; laser micromachining; microelectromechanical systems; optical; shear stress; skin friction;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
Type :
conf
DOI :
10.1109/TRANSDUCERS.2015.7181168
Filename :
7181168
Link To Document :
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