Characterization of Large Area PLD Grown Combinatorial Compositions of Barium Strontium Titanium Oxides

Pulsed laser deposition (PLD) technique is used to grow 6 different films using three primary targets, namely BaTiO₃, SrTiO₃, and Ba_0.6Sr_.4TiO₃. In addition to the original three materials of the targets, three new combinatorial materials have been synthesized. The new materials are mixes of BaTiO₃ + SrTiO₃, SrTiO₃ + Ba _0.6Sr_.4TiO₃, BaTiO₃ + Ba_0.6Sr_.4TiO₃. The material properties were investigated using X-ray diffraction, atomic force microscopy, I-V measurements and C-V analysis. The results indicate that we the materials deposited are pervoskites with high dielectric constants suitable for high-K MOSFETS, memory cells, and microwave components and arrays