Title :
Failure mode analysis of al2O2-parylene c bilayer encapsulation for implantable devices and application to penetrating neural arrays
Author :
Caldwell, R. ; Rieth, L. ; Xie, X. ; Sharma, R. ; Solzbacher, F. ; Tathireddy, P.
Author_Institution :
Dept. of Bioeng., Univ. of Utah, Salt Lake City, UT, USA
Abstract :
We assess the performance of a parylene C - aluminum oxide bilayer encapsulation strategy as it applies to implantable devices with non-planar topography. Electrochemical measurements of devices subject to in vitro accelerated lifetime testing are analyzed to evaluate benefits of bilayer encapsulation versus parylene C alone. Failure modes associated with device features and topographies are identified and solutions are presented that promote stability of device impedances.
Keywords :
aluminium compounds; biomedical equipment; biomedical materials; electrochemistry; encapsulation; life testing; neurophysiology; polymers; prosthetics; Al2O3; electrochemical measurements; failure mode analysis; implantable devices; in vitro accelerated lifetime testing; nonplanar topography; parylene C-aluminum oxide bilayer encapsulation strategy; penetrating neural arrays; Aluminum oxide; Electrodes; Encapsulation; Impedance; Performance evaluation; Surfaces; Testing; Neural interface; aluminum oxide; atomic layer deposition; encapsulation; impedance spectroscopy; parylene C;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7181283