• DocumentCode
    3471068
  • Title

    Direct bonding of PEN at room temperature by means of surface activated bonding method using nano-adhesion layer

  • Author

    Matsumae, Takashi ; Fujino, Masahisa ; Suga, Takashi

  • Author_Institution
    Dept. of Precision Eng., Univ. of Tokyo, Tokyo, Japan
  • fYear
    2013
  • fDate
    11-13 Nov. 2013
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    We realized the room temperature direct bonding method for polyethylene 2, 6 naphthalene dicarboxylate (polyethylene naphthalate, PEN) film by means of surface activated bonding method using nano-adhesion layer.
  • Keywords
    bonding processes; polymer films; surface treatment; PEN film; nanoadhesion layer; polyethylene 2, 6 naphthalene dicarboxylate; polyethylene naphthalate film; room temperature direct bonding method; surface activated bonding method; temperature 293 K to 298 K; Bonding; Films; Ion beams; Polymers; Silicon; Surface treatment; Polymer Bonding; Room Temperature Bonding; Surface Activated Bonding;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    CPMT Symposium Japan (ICSJ), 2013 IEEE 3rd
  • Conference_Location
    Kyoto
  • Print_ISBN
    978-1-4799-2718-0
  • Type

    conf

  • DOI
    10.1109/ICSJ.2013.6756120
  • Filename
    6756120
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3471068